Numerical Study on Collision-Less Plasma Sheaths of RF-Glow Discharge
نویسندگان
چکیده
منابع مشابه
Simulation and Model Reduction Methodsfor an RF Plasma Glow Discharge
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ژورنال
عنوان ژورنال: Physics Procedia
سال: 2012
ISSN: 1875-3892
DOI: 10.1016/j.phpro.2012.03.659